Title:
A susceptor and a manufacture device
Document Type and Number:
Japanese Patent JP6149576
Kind Code:
B2
Inventors:
Kazuhiko Horino
Application Number:
JP2013157065A
Publication Date:
June 21, 2017
Filing Date:
July 29, 2013
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/68; C23C16/458; H01L21/205; H01L21/683
Domestic Patent References:
| JP5029230A | ||||
| JP5275355A | ||||
| JP2005232488A | ||||
| JP4065446U | ||||
| JP2011018662A | ||||
| JP2004247339A | ||||
| JP2002265295A | ||||
| JP2009071210A |
Attorney, Agent or Firm:
Shuhei Katayama
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