Title:
A test method of a solid state switch element
Document Type and Number:
Japanese Patent JP5927666
Kind Code:
B2
Inventors:
Miyazawa direct
Application Number:
JP2012082329A
Publication Date:
June 01, 2016
Filing Date:
March 30, 2012
Export Citation:
Assignee:
Sumitomo Electric Device Innovation Co., Ltd.
International Classes:
H03K17/693; H01L21/822; H01L27/04; H03K17/00
Domestic Patent References:
| JP2011055129A | ||||
| JP2010219977A | ||||
| JP2006332778A | ||||
| JP2005303940A | ||||
| JP2010226350A | ||||
| JP2003298305A |
Attorney, Agent or Firm:
Shuhei Katayama