Title:
厚み計測方法及び厚み計測装置、並びに欠陥検出方法及び欠陥検出装置
Document Type and Number:
Japanese Patent JP6628113
Kind Code:
B2
Abstract:
A defect detection method for measuring a depth of a defect inside an inspection object is provided. The defect detection method comprises the steps of: heating a surface of the inspection object by a heating device; generating thermal image data corresponding to a temperature of the surface of the inspection object by photographing the heated surface of the inspection object at a predetermined time interval by a photographing device; obtaining a temperature curve showing a temporal change in temperature of the surface of the inspection object based on the thermal image data (S150); fitting a theoretical equation obtained from a heat conduction equation including a parameter related to the depth of the defect of the inspection object to the temperature curve to obtain a theoretical curve showing a temporal change in temperature of the surface of the inspection object (S151); and obtaining the depth of the defect of the inspection object based on a value of the parameter included in the theoretical equation corresponding to the theoretical curve (S152).
Inventors:
Yosuke Irie
Yuuji Inoue
Tokunaga Shogo
Kurokawa Yu
Takuya Niioka
Yuuji Inoue
Tokunaga Shogo
Kurokawa Yu
Takuya Niioka
Application Number:
JP2017563402A
Publication Date:
January 08, 2020
Filing Date:
October 27, 2016
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
G01N25/72; G01B21/08; G01J5/48
Domestic Patent References:
| JP566209A |
Foreign References:
| US20070041422 | ||||
| US20020128797 | ||||
| US20050186327 | ||||
| US20140153608 |
Attorney, Agent or Firm:
Michiko Matsutani