Title:
A thin career for glass substrates, and directions for use for the same
Document Type and Number:
Japanese Patent JP5963218
Kind Code:
B2
Inventors:
Bruning, Andre
High Mill, Oliver
Hinter schuster, liner
Wolf, Hans Georg
High Mill, Oliver
Hinter schuster, liner
Wolf, Hans Georg
Application Number:
JP2014531115A
Publication Date:
August 03, 2016
Filing Date:
September 27, 2011
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; B65G49/06; C23C14/50; C23C16/44
Domestic Patent References:
| JP2000336476A | ||||
| JP2006056610A | ||||
| JP2005172783A | ||||
| JP11246046A |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori