Title:
蒸着材及び該蒸着材を用いた蒸着膜の形成方法
Document Type and Number:
Japanese Patent JP5418242
Kind Code:
B2
Inventors:
Yoshikazu Mayu
Application Number:
JP2010009719A
Publication Date:
February 19, 2014
Filing Date:
January 20, 2010
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C23C14/32; C23C14/24; H01B5/14
Domestic Patent References:
JP2000273617A | ||||
JP2006117462A | ||||
JP2009199986A | ||||
JP6322527A | ||||
JP2066164A | ||||
JP2001355061A | ||||
JP2011111654A |
Attorney, Agent or Firm:
Masayoshi Suda