Title:
ストロンチウムとカルシウムとを含む酸化物膜製造用の蒸着材
Document Type and Number:
Japanese Patent JP5307039
Kind Code:
B2
Abstract:
PURPOSE: Metal oxide polycrystalline is provided to manufacture an oxide film containing strontium and calcium under the stable condition of a physical vapor deposition process by being used as a depositing agent. CONSTITUTION: Metal oxide polycrystalline is formed into crystal particles containing strontium and calcium with the molar ratio of 0.2:0.8 to 0.8:0.2. The metal oxide polycrystalline contains 0.0005-20 mol of one or more metal elements selected from a group including silicon, aluminum, titanium, zirconium, and rare earth element, based on the total molar amount of the strontium and the calcium. The average pore diameter of the metal oxide polycrystalline is between 0.01 and 0.50um. The relative density of the metal oxide polycrystalline is more than or equal to 90%.
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Inventors:
Masuda Akira
Kaoru Takasaki
Masato Zaita
Kaoru Takasaki
Masato Zaita
Application Number:
JP2010004916A
Publication Date:
October 02, 2013
Filing Date:
January 13, 2010
Export Citation:
Assignee:
Ube Material Industries Ltd.
International Classes:
H01J9/02; C23C14/24; H01J11/22; H01J11/34; H01J11/40
Domestic Patent References:
| JP2009256195A | ||||
| JP2002294432A | ||||
| JP2009298655A | ||||
| JP10291854A | ||||
| JP2000103614A | ||||
| JP2005222722A |
Foreign References:
| WO2010008020A1 |
Attorney, Agent or Firm:
Yanagawa Yasuo