Title:
ULTRASONIC DEVICE
Document Type and Number:
Japanese Patent JP2023162600
Kind Code:
A
Abstract:
To provide an ultrasonic device including a through electrode without having a space.SOLUTION: An ultrasonic device 1 comprises: a first substrate 10 including ultrasonic elements 13; electrodes 11, 12 on the first substrate 10; a second substrate 20 including opening parts 21, 22 to penetrate from a first surface 20a opposing to the first substrate 10 to a second surface 20b on the opposite side of the first surface 20a; and gap materials 14 held between the first substrate 10 or the electrodes 11, 12 and the second substrate 20 so as to separate the first substrate 10 from the second substrate 20. The second substrate 20 is laminated in a first direction with respect to the first substrate 10. The opening parts 21, 22 are overlapped with the electrodes 11, 12 in a plane view from the first direction. Areas surrounded by the gap materials 14 include: surrounding parts 15 for surrounding the opening parts 21, 22; and communication parts 16, 17 extending from a part of each one of the surrounding parts 15 and extending between the first substrate 10 and the second substrate 20 so as to allow the opening parts 21, 22 to be opened to atmosphere.SELECTED DRAWING: Figure 2
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Inventors:
MATSUDA YOJI
Application Number:
JP2022073039A
Publication Date:
November 09, 2023
Filing Date:
April 27, 2022
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H04R17/00; H10N30/30
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura