Title:
An un-evaporating type gette and an un-evaporating type getter pump
Document Type and Number:
Japanese Patent JP6133821
Kind Code:
B2
Abstract:
A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.
Inventors:
Fumio Watanabe
Watanabe Excitation
Watanabe Excitation
Application Number:
JP2014162078A
Publication Date:
May 24, 2017
Filing Date:
August 08, 2014
Export Citation:
Assignee:
Limited company vacuum laboratory
International Classes:
F04B37/02; F04B37/04; H01J7/18
Domestic Patent References:
| JP40002962B1 | ||||
| JP2004202309A | ||||
| JP2008520831A | ||||
| JP2014118940A | ||||
| JP50027603B1 |
Foreign References:
| US3961897 | ||||
| US6106237 |
Attorney, Agent or Firm:
Keizo Okamoto