A used silicon coolant processing unit and a used silicon coolant disposal method

Title:

A used silicon coolant processing unit and a used silicon coolant disposal method

Document Type and Number:

Japanese Patent JP6137945

Kind Code:

B2

Inventors:

Kazuma Inoue
Yoshiki Nodo
Dai Ogita
Masayuki Tamai
Eiji Motooka

Application Number:

JP2013117861A

Publication Date:

May 31, 2017

Filing Date:

June 04, 2013

Export Citation:

Assignee:

KURARAY CO.,LTD.

International Classes:

B24B57/02; B01D63/02; B01D65/02

Domestic Patent References:

JP2001054789A
JP8299767A

Foreign References:

US6929532

Attorney, Agent or Firm:

Etsushi Kotani
Masataka Otani
Tamagushi Yukihisa

Previous Patent: A semiconductor device, a testing circuit, and a test method

Next Patent: SUSNHINE SENSOR