EVALUATING METHOD OF SILICON MATERIAL MANUFACTURING PROCESS AND MANUFACTURING METHOD OF SILICON MATERIAL

Title:

EVALUATING METHOD OF SILICON MATERIAL MANUFACTURING PROCESS AND MANUFACTURING METHOD OF SILICON MATERIAL

Document Type and Number:

Japanese Patent JP2018107228

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a new method capable of estimating a source of heavy metal contamination of a silicon material in a process of manufacturing a silicon material.SOLUTION: An evaluation method of a silicon material manufacturing process including a step of using a member containing a carbon-containing sintered body includes performing DLTS measurement on the silicon material manufactured in the manufacturing process and estimating a heavy metal contamination source of the silicon material manufactured in the manufacturing process by using the presence or absence of detection of the peak of the heavy metal related level in a DLTS spectrum obtained by the measurement and the presence or absence of detection of the peak of the carbon related level as indexes.SELECTED DRAWING: None

Inventors:

MITSUGI NORITOMO
ERIGUCHI KAZUTAKA
SAMATA SHUICHI
MASADA AYUMI

Application Number:

JP2016250552A

Publication Date:

July 05, 2018

Filing Date:

December 26, 2016

Export Citation:

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