WORK-PIECE TRANSPORT METHOD FOR PROCESSING LINE AND WORK-PIECE TRANSPORT DEVICE

Japanese Patent JP2017178490

A

PROBLEM TO BE SOLVED: To solve a problem that a conventional manner; in which after one work-piece is passed through a processing line, a succeeding work-piece is fed; is difficult to enhance a productivity.SOLUTION: A work-piece transport method for a processing line, in which work-pieces W are sequentially in the processing line where a front chamber 1, a main processing chamber 2, and a rear chamber 3 are individually sealable and arranged in this order, comprises: sealing the main processing chamber 2 while opening the font chamber 1 and the rear chamber 3 to the outdoor; transporting a work-piece from the outdoor to the front chamber 1, while transporting a work-piece from the rear chamber 3 to the outdoor; then, sealing the front camber 1 and the rear chamber 3 and replacing atmosphere in both rooms 1, 3 with atmosphere in the main processing chamber 2; and then, opening both of the front chamber 1 and the rear chamber 3 to the main processing chamber 2 so as to transport work-pieces through the respective chambers 1 to 3, so that multiple work-pieces W are present in the processing line to effectively use the respective chambers 1 to 3, and thereby a production efficiency can be enhanced.SELECTED DRAWING: Figure 1

JPH0510321	[Name of invention] Net conveyor device for cooling
JP6681994	A device for transporting a substrate carrier in a vacuum chamber, a system for vacuuming a substrate, and a method for transporting a substrate carrier in a vacuum chamber.

SEGAWA TERUO
KISHI HIRONAGA

JP2016064362A

October 05, 2017

March 28, 2016

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NISSAN MOTOR

B65G49/00; B65G54/02

Janggi Motonori

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