Title:
ABRASIVE PAD
Document Type and Number:
WIPO Patent Application WO/2016/052155
Kind Code:
A1
Abstract:
This abrasive pad is provided with an abrasive layer having an abrasive area and a light-transmissive area, wherein the light-transmissive area has a curved surface of convex shape towards the surface side of the abrasive area, the apical portion of the curved surface of the light-transmissive area being positioned coplanar to the surface of the abrasive area or above the surface of the abrasive area. According to this abrasive pad, there can be provided an abrasive pad which resists peeling during use, and with which it is possible to minimize endpoint detection error associated with a decline in the light transmission rate from the initial period of use until the final phase.
Inventors:
SHIMIZU SHINJI (JP)
Application Number:
PCT/JP2015/075986
Publication Date:
April 07, 2016
Filing Date:
September 14, 2015
Export Citation:
Assignee:
TOYO TIRE & RUBBER CO (JP)
International Classes:
B24B37/26; B24B37/013; H01L21/304
Foreign References:
| JP2003285258A | 2003-10-07 | |||
| JP2004106174A | 2004-04-08 | |||
| JP2009224384A | 2009-10-01 | |||
| JP2007245281A | 2007-09-27 |
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
Patent business corporation ユニアス international patent firm (JP)
Patent business corporation ユニアス international patent firm (JP)
Download PDF: