Title:
ACCELERATION SENSOR AND METHOD OF PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/1999/013343
Kind Code:
A1
Abstract:
A low-cost and highly accurate acceleration sensor relying upon neither sophisticated semiconductor technology nor micromachining technology, and a method of producing the same. A silicon board (1) is used for only a portion where distortion develops due to acceleration and other auxiliary boards (4A, 4B), caps (8A, 8B) and mass bodies (6A, 6B) are made of glass. The silicon board (1), mass bodies (6A, 6B) and auxiliary boards (4A, 4B), as well as the auxiliary boards (4A, 4B) and caps (8A, 8B) are directly joined together.
Inventors:
NAKATANI MASAYA (JP)
YAGI YUJI (JP)
YAGI YUJI (JP)
Application Number:
PCT/JP1998/003994
Publication Date:
March 18, 1999
Filing Date:
September 07, 1998
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
NAKATANI MASAYA (JP)
YAGI YUJI (JP)
NAKATANI MASAYA (JP)
YAGI YUJI (JP)
International Classes:
G01P15/08; G01P15/09; G01P15/12; G01P15/125; (IPC1-7): G01P15/12; G01P15/125; H01L29/84
Foreign References:
| JPH0489577A | 1992-03-23 | |||
| JPH05119060A | 1993-05-14 | |||
| JPH06160420A | 1994-06-07 | |||
| JPH0494186A | 1992-03-26 | |||
| US5006487A | 1991-04-09 | |||
| JPH08181330A | 1996-07-12 |
Other References:
See also references of EP 0937985A4
Attorney, Agent or Firm:
Iwahashi, Fumio (Ltd. 1006 Oaza Kadoma, Kadoma-shi Osaka, JP)
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