Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/088021
Kind Code:
A1
Abstract:
An acceleration sensor element (100) is packaged to form an acceleration sensor. The acceleration sensor element (100) is provided with a weight part (11), a frame-shaped base part (12) surrounding the weight part (11), a beam part (13) for supporting the weight part (11) with respect to the base part (12), and a distortion detecting part (14) formed in the beam part (13). The base part (12) is provided with four frame edges (12Sa, 12Sb, 12Sc, 12Sd). The acceleration sensor is mounted so that the frame edge (12Sc) of the acceleration sensor element (100) faces a mounting surface (MS) of a board on which the acceleration sensor is to be mounted. Specifically, the beam part (13) of the acceleration sensor element (100) is formed in the frame edge (12Sa) on the far side from the mounting surface.
Inventors:
EIYAMA DAICHI (JP)
Application Number:
PCT/JP2013/082546
Publication Date:
June 12, 2014
Filing Date:
December 04, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01P15/08; B81B3/00; G01P15/12; H01L29/84
Foreign References:
| JPS62190775A | 1987-08-20 | |||
| JPH08320341A | 1996-12-03 | |||
| JPH0835983A | 1996-02-06 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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