Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/111416
Kind Code:
A1
Abstract:
This acceleration sensor has a detection element, a counter electrode and an upper cover. The detection element includes an active layer, a base layer, an oxide film layer that is provided between the active layer and the base layer, a first insulating layer, a contact section, and a self diagnostic electrode. The first insulating layer is provided on the active layer side that is the reverse side of the oxide film layer, and has a first opening provided therein. The contact section is provided on a part of the first insulating layer, said part being on the reverse side of the active layer, and has a first metal layer that is connected to the active layer via the first opening. The counter electrode is provided at a position facing the self diagnostic electrode, and the upper cover supports the counter electrode.
Inventors:
FUJII ATSUHIRO
IMANAKA TAKASHI
MIYOSHI YUICHI
AIZAWA HIROYUKI
IMANAKA TAKASHI
MIYOSHI YUICHI
AIZAWA HIROYUKI
Application Number:
PCT/JP2015/000312
Publication Date:
July 30, 2015
Filing Date:
January 26, 2015
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01P15/08; G01P15/12; G01P21/00
Foreign References:
| JP2012008023A | 2012-01-12 | |||
| JPH10300772A | 1998-11-13 | |||
| JP2010169685A | 2010-08-05 | |||
| JP2005127890A | 2005-05-19 | |||
| US5554875A | 1996-09-10 | |||
| JPH05273231A | 1993-10-22 |
Attorney, Agent or Firm:
FUJII, Kentaro et al. (JP)
Fujii Kentaro (JP)
Fujii Kentaro (JP)
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