Title:
ACCELERATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2022/239692
Kind Code:
A1
Abstract:
A sensor element includes first and second variable capacitances having capacitance values that vary in mutually opposite directions in accordance with acceleration. A drive circuit uses a second drive signal having a predetermined modulation frequency to modulate a first drive signal that is to be supplied to the sensor element in order to detect the acceleration, and supplies a signal having each component of the first and second drive signals to the sensor element. A detection signal generating circuit generates a detection signal corresponding to a difference between the capacitance values of the first and second variable capacitances. An acceleration signal generating circuit generates an acceleration signal by subjecting the detection signal to low-pass processing. A modulation component extracting circuit generates a modulation component extracted signal by extracting the signal component having the modulation frequency from the detection signal.
Inventors:
YAMASHIRO YO (JP)
Application Number:
PCT/JP2022/019490
Publication Date:
November 17, 2022
Filing Date:
May 02, 2022
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
G01P15/125
Foreign References:
| US20090241634A1 | 2009-10-01 | |||
| JP2018159630A | 2018-10-11 | |||
| JP2008107108A | 2008-05-08 | |||
| JP2019502910A | 2019-01-31 |
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
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