Title:
ACCELERATOR SENSOR
Document Type and Number:
WIPO Patent Application WO/2005/012922
Kind Code:
A1
Abstract:
[PROBLEMS] To provide an accelerator sensor enabling the easy adjustment of the resonance characteristics of two resonators for an acceleration detection element in a case member-adhered state. [MEANS FOR SOLVINGG PROBLEMS] This acceleration sensor (1A) comprises the bimorph acceleration detection element (2A) in which the first and second resonators (3) and (4) are joined to both faces of a base plate (5) in the acceleration application direction. The longitudinal one end part or both end parts of the acceleration detection element (2A) are fixedly supported so that the first and second resonators (3) and (4) can be deflected in a same direction according to the application of the acceleration. The frequency variation or impedance variation of the first and second resonators (3) and (4) caused by the deflection of the acceleration detection element (2A) is detected differentially so that the acceleration can be detected. The both side faces of the acceleration detection element in the acceleration application direction are covered by a pair of case members (6), and the electrodes (3a) and (4a) of the first and second resonators on both principal planes thereof face an opening face in a direction perpendicular to the acceleration application direction formed of the acceleration detection element and the case members so that the electrodes can be easily trimmed.
Inventors:
MIKADO ATSUSHI (JP)
TABOTA JUN (JP)
TABOTA JUN (JP)
Application Number:
PCT/JP2004/009314
Publication Date:
February 10, 2005
Filing Date:
July 01, 2004
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
MIKADO ATSUSHI (JP)
TABOTA JUN (JP)
MIKADO ATSUSHI (JP)
TABOTA JUN (JP)
International Classes:
G01P15/09; G01P15/097; (IPC1-7): G01P15/10
Foreign References:
| JP2002107372A | 2002-04-10 |
Attorney, Agent or Firm:
Tsutsui, Hidetaka (2-5 Omiya-cho 7-chome, Nara-sh, Nara 15, JP)
Download PDF: