Title:
ACOUSTIC RESONATOR BASED ON HIGH-CRYSTALLINITY DOPED PIEZOELECTRIC FILM AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/266789
Kind Code:
A1
Abstract:
The present disclosure provides an acoustic resonator based on a high-crystallinity doped piezoelectric film. The acoustic resonator comprises: a substrate; a seed layer disposed on the substrate, a Bragg reflection structure being formed between the substrate and the seed layer; a doped layer disposed on the seed layer; and a metal electrode disposed on the doped layer, wherein the seed layer is configured to increase the lattice matching between the doped layer and the substrate, and is configured to reflect acoustic waves emitted by the doped layer. The present disclosure also provides a manufacturing method for the acoustic resonator.
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Inventors:
ZUO CHENGJIE (CN)
LIN FUHONG (CN)
WU ZIYING (CN)
YANG KAI (CN)
LIN FUHONG (CN)
WU ZIYING (CN)
YANG KAI (CN)
Application Number:
PCT/CN2021/101172
Publication Date:
December 29, 2022
Filing Date:
June 21, 2021
Export Citation:
Assignee:
UNIV SCIENCE & TECHNOLOGY CHINA (CN)
International Classes:
H03H9/25; H03H3/04; H03H3/10; H03H9/17
Domestic Patent References:
| WO2020169304A1 | 2020-08-27 |
Foreign References:
| CN111801890A | 2020-10-20 | |||
| CN110943708A | 2020-03-31 | |||
| US20210021255A1 | 2021-01-21 | |||
| CN112953436A | 2021-06-11 | |||
| CN112997404A | 2021-06-18 | |||
| CN204408291U | 2015-06-17 | |||
| CN112653415A | 2021-04-13 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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