Title:
ACOUSTIC RESONATOR AND ITS FABRICATING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/063842
Kind Code:
A1
Abstract:
An acoustic resonator has a multilayer structure constituted of a piezoelectric
layer composed of a tensile stress layer and a compression stress layer. The mechanical
strength of the piezoelectric layer is thereby is enhanced, and any crack is prevented
from being produced, thereby realizing a high electromagnetic coupling coefficient.
The acoustic resonator (1) comprises a first electrode (13) composed of at least
one conductive layer, a piezoelectric layer (14) formed adjacently on the upper
surface of the first electrode (13) and composed of a plurality of layers, and
a second electrode (15) formed adjacently on the upper surface of the piezoelectric
layer (14) and composed of at least one conductive layer. The piezoelectric layer
(14) has a tensile stress layer (23) in which tensile stress is present and compression
stress layers (21, 25) in which compression stress is present. The tensile stress
in the tensile stress layer (23) and the compression stress in the compression
stress layer (21, 25) are adjusted as to cancel each other.
Inventors:
SATOU KEI (JP)
Application Number:
PCT/JP2006/323707
Publication Date:
June 07, 2007
Filing Date:
November 28, 2006
Export Citation:
Assignee:
SONY CORP (JP)
SATOU KEI (JP)
SATOU KEI (JP)
International Classes:
H03H9/17; H01L41/09; H01L41/18; H01L41/22; H01L41/316; H03H3/02
Foreign References:
| JP2003051732A | 2003-02-21 | |||
| JP2001203558A | 2001-07-27 |
Attorney, Agent or Firm:
NAKAMURA, Tomoyuki (Toranomon Kotohira Tower 2-8, Toranomon 1-chome, Minato-k, Tokyo 01, JP)
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