Title:
ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2024/055388
Kind Code:
A1
Abstract:
The present disclosure relates to an acoustic resonator wherein each resonant element is at least partly coated with vertical electrodes on side walls of its top piezoelectric part and solidly mounted with its bottom part on an underlaying supporting substrate. The bottom part of each resonant element has a width smaller than λ/2, where λ is a wavelength of a shear acoustic wave in the bottom part at a resonance frequency determined by the top part. Given this condition, a total width of the top part and the electrodes is greater than the width of the bottom part, and vibrations from the top part cannot propagate through the bottom part, thereby leading to increasing piezo-coupling and providing structural solidity. Moreover, a heat evacuation path can go in each resonant element from its top part to the substrate through its bottom part, which may improve the power-handling properties of the resonator.
Inventors:
PLESSKI VIKTOR (CN)
ZHANG NAIQING (CN)
ZHANG NAIQING (CN)
Application Number:
PCT/CN2022/128015
Publication Date:
March 21, 2024
Filing Date:
October 27, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/02
Domestic Patent References:
| WO2020092414A2 | 2020-05-07 |
Foreign References:
| US20200328726A1 | 2020-10-15 | |||
| CN115004548A | 2022-09-02 | |||
| CN106575957A | 2017-04-19 |
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