Title:
ACOUSTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/171721
Kind Code:
A1
Abstract:
The present invention inhibits warping and destruction of a piezoelectric layer while suppressing spurious. This acoustic wave device comprises: a piezoelectric layer that has a first main surface and a second main surface which is on the opposite side to the first main surface and is in a first direction with respect to the first main surface; and an IDT electrode comprising a first electrode that has electrode fingers extending in a second direction intersecting the first direction, and a second electrode that extends in the second direction and has electrode fingers opposing the electrode fingers of the first electrode in a third direction orthogonal to the second direction. The IDT electrode includes: a plurality of first group of electrode fingers that are successively arranged in the third direction; a plurality of second group of electrode fingers that are successively arranged in the third direction; and a plurality of third group of electrode fingers that are successively arranged in the third direction. The first group of electrode fingers have a first width which is the largest, the second group of electrode fingers have a second width which is the smallest, and the third group of electrode fingers have a third width which is greater than the second width. When viewed in the third direction, the electrode fingers are arranged in the order of the third group of electrode fingers, the second group of electrode fingers, the first group of electrode fingers, the second group of electrode fingers, and the third group of electrode fingers.
Inventors:
KIMURA TETSUYA (JP)
Application Number:
PCT/JP2023/008893
Publication Date:
September 14, 2023
Filing Date:
March 08, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145
Domestic Patent References:
| WO2017131170A1 | 2017-08-03 | |||
| WO2021200835A1 | 2021-10-07 | |||
| WO2010047112A1 | 2010-04-29 |
Foreign References:
| JP2018182460A | 2018-11-15 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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