ACOUSTIC WAVE DEVICE - MURATA MANUFACTURING CO

Title:

ACOUSTIC WAVE DEVICE

Document Type and Number:

WIPO Patent Application WO/2024/043343

Kind Code:

A1

Abstract:

Provided is an acoustic wave device capable of making a filter device smaller and reducing electric resistance in electrodes connected to potentials other than input and output potentials.　An acoustic wave device 10 according to the present invention comprises: a piezoelectric film including a piezoelectric layer 14 comprising a piezoelectric body; a first comb electrode 17 which is provided on the piezoelectric layer 14 and has a first busbar 22 and a plurality of first electrode fingers 25, ends of which are connected to the first busbar 22; a second comb electrode 18 which is provided on the piezoelectric layer 14 and has a second busbar 23 and a plurality of second electrode fingers 26, ends of which are connected to the second busbar 23 and which are interposed among the plurality of first electrode fingers 25; a third electrode 27 which is connected to a different potential from the first comb electrode 17 and the second comb electrode 18 and has a plurality of third electrode fingers 27 which are provided on the piezoelectric layer 14 so as to be lined up with the first electrode fingers 25 and the second electrode fingers 26 in plan view in the direction of lining up with the first electrode fingers 25 and the second electrode fingers 26, and at least one third busbar 24 connecting neighboring third electrode fingers 27; and an insulation layer 29 provided on the piezoelectric layer 14. One of the first comb electrode 17 or the second comb electrode 18 is connected to the input potential. The other of the first comb electrode 17 or the second comb electrode 18 is connected to the output potential. As concerns the order in which the first electrode fingers 25, the second electrode fingers 26, and the third electrode fingers 27 are lined up, if starting from the first electrode finger 25, one first electrode finger 25, one third electrode finger 27, one second electrode finger 26, and one third electrode finger 27 constitute one cycle in this order. At least either a part of the first comb electrode 17 and a part of the third electrode 27, or a part of the second comb electrode 18 and a part of the third electrode 27 intersect with the insulation layer 29 on the piezoelectric layer 14.

Inventors:

MIMURA MASAKAZU (JP)
NAGATOMO SHO (JP)
NODAKE NAOHIRO (JP)

Application Number:

PCT/JP2023/030812

Publication Date:

February 29, 2024

Filing Date:

August 25, 2023

Export Citation:

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Assignee:

MURATA MANUFACTURING CO (JP)

International Classes:

H03H9/145

Domestic Patent References:

WO2020130128A1

2020-06-25

Foreign References:

JP2015144418A	2015-08-06
JP2015106802A	2015-06-08
JPS5643818A	1981-04-22
US10833650B1	2020-11-10
JPH11186867A	1999-07-09