Title:
ACTIVE ANTI-VIBRATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/138656
Kind Code:
A1
Abstract:
This active anti-vibration device (A) is provided with: a stage (4) for positioning a mounted object (S); an anti-vibration base (1) supporting the stage (4); a servo valve (24) which provides the anti-vibration base (1) with a control force for suppressing a vibration thereof; a stage information acquisition unit (6d) which acquires in advance a stage state signal based on information relating to a movement control of the stage (4); a resonance suppression unit (6f) which removes a resonance frequency component from the stage state signal; and an vibration-damping feed-forward control unit (6e) which, on the basis of the stage state signal from which the resonance frequency component has been removed, subjects the servo valve (24) to a feed-forward control such that the control force is commensurate with the vibration generated in the anti-vibration base (1) due to a movement of the stage (4).
Inventors:
KISHIMOTO ICHIRO (JP)
ABE SEIGO (JP)
ABE SEIGO (JP)
Application Number:
PCT/JP2018/040116
Publication Date:
July 18, 2019
Filing Date:
October 29, 2018
Export Citation:
Assignee:
KURASHIKI KAKO (JP)
International Classes:
F16F15/027; F16F15/02; F16F15/04; G05D19/02
Foreign References:
| JP4970904B2 | 2012-07-11 | |||
| JP2007155038A | 2007-06-21 | |||
| JP2005195064A | 2005-07-21 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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