Title:
ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, AND ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE FILM
Document Type and Number:
WIPO Patent Application WO/2016/140000
Kind Code:
A1
Abstract:
To provide: an active light sensitive or radiation sensitive resin composition which has high dissolution contrast and is capable of forming a good pattern with low roughness without depending on the polarity of a developer liquid, and which is not susceptible to the occurrence of bridge defects; and an active light sensitive or radiation sensitive film which contains this composition. This active light sensitive or radiation sensitive resin composition contains (A) a resin that contains, as an acid-decomposable group that is decomposed by the action of an acid and generates a polar group, at least an acid-decomposable group represented by general formula (1), and (B) a compound that generates an acid by means of irradiation of active light or radiation.
In the formula, each of R1 and R2 independently represents a substituent; L1 represents an (n + 1)-valent linking group; X represents a crosslinkable reactive group; n represents an integer of 1 or more; and * represents the bonding position to the main chain of the resin (A). Two moieties selected from among R1, R2 and L1 may combine together to form a ring. In cases where L1 is not a polycyclic aliphatic group nor -C(CF3)2- and L1 forms a ring together with R1 or R2, the thus-formed ring is not a polycyclic aliphatic group.
More Like This:
Inventors:
NISHIO RYO (JP)
FURUTANI HAJIME (JP)
SHIRAKAWA MICHIHIRO (JP)
SHIBUYA AKINORI (JP)
FURUTANI HAJIME (JP)
SHIRAKAWA MICHIHIRO (JP)
SHIBUYA AKINORI (JP)
Application Number:
PCT/JP2016/052885
Publication Date:
September 09, 2016
Filing Date:
February 01, 2016
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G03F7/039; C08F20/28; G03F7/004; G03F7/038; G03F7/30; G03F7/38
Foreign References:
| JP2011145424A | 2011-07-28 | |||
| JP2013151592A | 2013-08-08 | |||
| JP2014178479A | 2014-09-25 | |||
| JP2009251216A | 2009-10-29 | |||
| JP2014081633A | 2014-05-08 | |||
| JP2003280202A | 2003-10-02 | |||
| JP2012220800A | 2012-11-12 | |||
| JP2011053666A | 2011-03-17 | |||
| JP2011116945A | 2011-06-16 | |||
| JP2010197849A | 2010-09-09 | |||
| JP2009244425A | 2009-10-22 | |||
| JP2015108809A | 2015-06-11 | |||
| JP2015087644A | 2015-05-07 | |||
| JP2015043079A | 2015-03-05 |
Attorney, Agent or Firm:
NAKASHIMA Junko et al. (JP)
Junko Nakajima (JP)
Junko Nakajima (JP)
Download PDF: