Title:
ACTUATOR, FLUID CONTROL DEVICE, AND ACTUATOR MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/186860
Kind Code:
A1
Abstract:
In the present invention, a first power feeding member (61) and a second power feeding member (62) are disposed on the same side with respect to a first member (20) in the thickness direction of an actuator (11). The first power feeding member (61) comprises a first external connection terminal (619). The second power feeding member (62) comprises a second external connection terminal (629). The first external connection terminal (619) and the second external connection terminal (629) are disposed at the same position in the thickness direction. A second insulation layer (72) is disposed between the second power feeding member (62) and a frame body (22). A far end-side portion (612) of the first power feeding member (61), which is on the side opposite the side at which the first external connection terminal (619) protrudes, is bent toward the frame body (22) side and is electrically connected to the frame body (22).
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Inventors:
TANAKA NOBUHIRA (JP)
Application Number:
PCT/JP2021/000675
Publication Date:
September 23, 2021
Filing Date:
January 12, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
B06B1/06; F04B43/02; H01L41/047; H01L41/09; H01L41/29
Domestic Patent References:
| WO2011145544A1 | 2011-11-24 |
Foreign References:
| JP2017133507A | 2017-08-03 | |||
| JP2008173546A | 2008-07-31 | |||
| JP2000184496A | 2000-06-30 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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