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Title:
ACTUATOR WITH REDUCED DRIVE CAPACITANCE
Document Type and Number:
WIPO Patent Application WO2006015378
Kind Code:
A3
Abstract:
Techniques are provided for reducing the amount of power required to activate a piezoelectric actuator (150) of a microelectromechanical structure. An insulating layer (185) is deposited on a piezoelectric layer (165). The insulating layer (185) is etched to remove a portion of the layer and expose the piezoelectric layer (165) in the etched areas. An electrode layer (170) is deposited on the piezoelectric layer (165) and insulating layer (185).

Inventors:
BIBL ANDREAS (US)
BIRKMEYER JEFFREY (US)
Application Number:
PCT/US2005/027752
Publication Date:
March 23, 2006
Filing Date:
August 01, 2005
Export Citation:
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Assignee:
DIMATIX INC (US)
BIBL ANDREAS (US)
BIRKMEYER JEFFREY (US)
International Classes:
H01L41/09; B41J2/14; B41J2/16; H01L41/047; H01L41/22; H01L41/24
Foreign References:
EP1256450A12002-11-13
US20030127946A12003-07-10
US20040108790A12004-06-10
EP1350625A22003-10-08
US6088893A2000-07-18
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