Title:
ADAMANTANE DERIVATIVE, METHOD FOR PRODUCING SAME AND PHOTOSENSITIVE MATERIAL FOR PHOTORESIST
Document Type and Number:
WIPO Patent Application WO/2005/108343
Kind Code:
A1
Abstract:
Disclosed is an adamantane derivative useful as a monomer for a functional resin such as a photoresist resin which is used as a photosensitive material for photoresists that is suitably used in fine processing, particularly in one using excimer laser light or electron beam. Also disclosed are a method for efficiently producing such an adamantane derivative and a photosensitive material for photoresists containing such an adamantane derivative and having the above-mentioned characteristics. Specifically disclosed is an adamantane derivative which is characterized by having a structure represented by the following general formula (I) (wherein R represents a hydrogen atom, a methyl group or a trifluoromethyl group; Y represents an alkyl group having 1-10 carbon atoms, a halogen atom or a hydroxyl group, or alternatively two Ys may combine together to form =O, and a plurality of Ys may be the same as or different from one another; k represents an integer of 0-15; m represents 0 or 1; and n represents an integer of 1-3). Also specifically disclosed are a method for producing an adamantane derivative represented by the above general formula (I) by reacting a haloalkyl adamantyl carboxylate with a (meth)acrylic acid or an acid anhydride thereof, and a photosensitive material for photoresists containing a polymer obtained from such an adamantane derivative.
Inventors:
ITO KATSUKI (JP)
TANAKA SHINJI (JP)
ONO HIDETOSHI (JP)
HATAKEYAMA NAOYOSHI (JP)
TANAKA SHINJI (JP)
ONO HIDETOSHI (JP)
HATAKEYAMA NAOYOSHI (JP)
Application Number:
PCT/JP2005/008354
Publication Date:
November 17, 2005
Filing Date:
May 06, 2005
Export Citation:
Assignee:
IDEMITSU KOSAN CO (JP)
ITO KATSUKI (JP)
TANAKA SHINJI (JP)
ONO HIDETOSHI (JP)
HATAKEYAMA NAOYOSHI (JP)
ITO KATSUKI (JP)
TANAKA SHINJI (JP)
ONO HIDETOSHI (JP)
HATAKEYAMA NAOYOSHI (JP)
International Classes:
C07C67/31; C07C67/313; C07C69/00; C07C69/67; C08F20/28; G03F7/039; H01L21/027; (IPC1-7): C07C69/67; C07C67/313; C08F20/28; G03F7/039; H01L21/027
Foreign References:
| JP2002193895A | 2002-07-10 |
Attorney, Agent or Firm:
Ohtani, Tamotsu (Bridgestone Toranomon Bldg. 6F. 25-2,
Toranomon 3-chome, Minato-k, Tokyo 01, JP)
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