Title:
ADJUSTABLE MULTI-ELECTRODE COLLIMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/197131
Kind Code:
A1
Abstract:
Provided are an adjustable multi-electrode collimating device and a charged particle system using the collimating device. The charged particle system comprises a charged particle source and an adjustable collimating lens. The adjustable collimating lens comprises multiple stages of electrodes distributed in an axial direction, wherein electrode holes for charged particle beams (11) to pass through are formed in each stage of electrode. In an advancing direction of the charged particle beams (11), the size of the electrode holes of the multiple stages of electrodes is not less than the size of the electrode holes in the preceding stage of electrode. Some electrodes in the multiple stages of electrodes are configured to supply power separately so as to provide different electrode combinations for the collimation of the charged particle beams (11). Therefore, by supplying power separately and applying different voltages to each electrode, the position of the main plane of the multi-electrode collimating device can be effectively adjusted, and the range of beam spot size can be adjusted. Moreover, the high-voltage requirement and the aberration can be balanced without changing the convergent ability.
Inventors:
LI QIONGBEN (CN)
LI MENGJIE (CN)
ZHANG CHAO (CN)
HE JIAKUN (CN)
ZHAO CHONG (CN)
LI MENGJIE (CN)
ZHANG CHAO (CN)
HE JIAKUN (CN)
ZHAO CHONG (CN)
Application Number:
PCT/CN2022/086235
Publication Date:
October 19, 2023
Filing Date:
April 12, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H01J37/147; H01J37/28
Foreign References:
| US20150137009A1 | 2015-05-21 | |||
| US20150124229A1 | 2015-05-07 | |||
| CN110622276A | 2019-12-27 | |||
| CN1645548A | 2005-07-27 |
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