Title:
ADJUSTABLE WAFER OVERTURNING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/042551
Kind Code:
A1
Abstract:
Disclosed in the present invention is an adjustable wafer overturning device which comprises a support. The support is provided with: a rotating shaft, the rotating shaft being sleeved with two overturning discs, the overturning discs being provided with a plurality of receiving grooves for receiving silicon wafers at intervals in the radial direction, and the receiving grooves on the two overturning discs collectively clamping and fixing the silicon wafer; a driving mechanism which is connected to the rotating shaft, the driving mechanism driving the rotating shaft to rotate, and the rotating shaft driving the overturning discs to overturn the silicon wafer from one side to the other side; a through hole matching the silicon wafer in size on the rotating shaft in the axial direction, the silicon wafer being translated from one side to the other side of the rotating shaft through the through hole; and a transmission mechanism which is used for transmitting the silicon wafer into the receiving groove and receiving the overturned silicon wafer, and is used for translating the silicon wafer from one side of the rotating shaft to the other side through the through hole. The adjustable wafer overturning device of the present invention can overturn a silicon wafer when overturning is needed, the overturning efficiency is high, and it can be guaranteed that the silicon wafer can stably pass through when overturning is not needed.
Inventors:
ZHANG XUEQIANG (CN)
DAI JUN (CN)
ZHANG JIANWEI (CN)
LUO YINBING (CN)
LI SHENGHE (CN)
DAI JUN (CN)
ZHANG JIANWEI (CN)
LUO YINBING (CN)
LI SHENGHE (CN)
Application Number:
PCT/CN2019/117956
Publication Date:
March 11, 2021
Filing Date:
November 13, 2019
Export Citation:
Assignee:
ROBOTECHNIK INTELLIGENT TECH CO LTD (CN)
International Classes:
H01L21/677; H01L31/18
Foreign References:
| CN107452656A | 2017-12-08 | |||
| CN105034555A | 2015-11-11 | |||
| CN105692150A | 2016-06-22 | |||
| KR20000020990A | 2000-04-15 |
Attorney, Agent or Firm:
CENTRAL SOUTH WELL INTELLECTUAL PROPERTY OFFICE (CN)
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