Title:
Ag ALLOY THIN FILM, AND Ag ALLOY SPUTTERING TARGET FOR FORMATION OF THE Ag ALLOY THIN FILM
Document Type and Number:
WIPO Patent Application WO/2008/035617
Kind Code:
A1
Abstract:
Disclosed are: an Ag alloy thin film having an initial reflectivity of 88% or more which
is comparable to that of Al and having excellent aggregation resistance and sulfur
resistance; and an Ag alloy sputtering target for forming the Ag alloy thin film.
Specifically disclosed are: [1] an Ag alloy thin film which contains Au or at
least two members selected from Au, Bi and Sn, which satisfies the requirements represented
by the following formulae (1) to (3): (1) 5.28[Bi]+0.15[Au]+1.14[Sn]≤8.7; (2)
1.0≤10[Bi]+[Au]; and (3) 2.0≤[Sn]+2[Au]4, and which
is treated with heat in an inert gas atmosphere at 130 to 200˚C; and [2] an
Ag alloy sputtering target for forming the Ag alloy thin film, which contains Au
or at least two members selected from Au, Bi and Sn, and which satisfies the requirements represented
by the following formulae (4) to (6): (4) 2.64[Bi]+0.15[Au]+1.14[Sn]≤8.7; (5)
1.0≤5[Bi]+[Au]; and (6) 2.0≤[Sn]+2[Au]4 (provided that
the variables [Bi], [Au] and [Sn] in the formulae represent the contents (at%)
of Bi, Au and Sn, respectively).
Inventors:
SATO TOSHIKI
KAWANAKA TAKAO
SUZUKI JUN
TAKAGI KATSUTOSHI
KAWANAKA TAKAO
SUZUKI JUN
TAKAGI KATSUTOSHI
Application Number:
PCT/JP2007/067847
Publication Date:
March 27, 2008
Filing Date:
September 13, 2007
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
SATO TOSHIKI
KAWANAKA TAKAO
SUZUKI JUN
TAKAGI KATSUTOSHI
SATO TOSHIKI
KAWANAKA TAKAO
SUZUKI JUN
TAKAGI KATSUTOSHI
International Classes:
C23C14/14; C22C5/06; C23C14/34; C23C14/58; G02B5/08
Foreign References:
| JP2006098856A | 2006-04-13 | |||
| JP2005332557A | 2005-12-02 | |||
| JP2004139712A | 2004-05-13 | |||
| JP2005029849A | 2005-02-03 | |||
| JP2005264329A | 2005-09-29 | |||
| JP2004197117A | 2004-07-15 |
Other References:
ONISHI T. ET AL.: "Adding Metal Elements to Improve the Corrosion Resistance of Silver-based Thin Films", R&D/KOBE STEEL ENGINEERING REPORTS, vol. 52, no. 2, 1 September 2002 (2002-09-01), pages 17 - 22, XP003018729
Attorney, Agent or Firm:
OGURI, Shohei et al. (7-13 Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, JP)
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