Title:
AIR CYLINDER
Document Type and Number:
WIPO Patent Application WO/2020/022628
Kind Code:
A1
Abstract:
The present invention relates to an air cylinder comprising: a housing having an internal space formed therein; a radial air bearing arranged in the internal space while encompassing the outer circumference of a shaft; a bush arranged in the internal space while encompassing the outer circumference of the radial air bearing; a first elastic body arranged between the housing and the bush; and a second elastic body arranged between the bush and the radial air bearing. Therefore, since the rigidity of the air bearing can be adjusted, a member to be transferred can be suctioned by means of a vacuum such that damage to the shaft of the air cylinder can be prevented during transferring and, since an elastic body provided on a seating part of the air bearing performs a tilting action, processing defects such as a concentric defect of the air bearing can be minimized and damage to the shaft, due to an external force, can be prevented.
Inventors:
LEE DONG HEON (KR)
YOOK IN SOO (KR)
YOO SUNG WOONG (KR)
LEE JONG SU (KR)
YOOK IN SOO (KR)
YOO SUNG WOONG (KR)
LEE JONG SU (KR)
Application Number:
PCT/KR2019/006073
Publication Date:
January 30, 2020
Filing Date:
May 21, 2019
Export Citation:
Assignee:
RPS CO LTD (KR)
International Classes:
H01L21/677
Foreign References:
| KR20110137602A | 2011-12-23 | |||
| KR20120133994A | 2012-12-11 | |||
| KR20090089772A | 2009-08-24 | |||
| KR20090077009A | 2009-07-13 | |||
| JP2005138276A | 2005-06-02 |
Attorney, Agent or Firm:
DARAE IP FIRM (KR)
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