Title:
ALIGNMENT DEVICE, FILM FORMING DEVICE, AND ALIGNMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2024/004326
Kind Code:
A1
Abstract:
Provided is an alignment device that is characterized by comprising: an image-capturing means that captures an edge image including an edge of a substrate 200 held by a holding means 100; an edge detection means that sets a detection region within the edge image and detects, from within the detection region, an edge of the substrate 200 that runs along a reference direction of the detection region; and an alignment means that aligns the substrate 200 in relation to the holding means 100 on the basis of the edge detected by the edge detection means, wherein the edge detection means determines, on the basis of the length of the detection region in the reference direction and the length of a line segment that runs along the reference direction and that has been detected from within the detection region, whether the line segment is an edge of the substrate 200.
Inventors:
KANDA HIROSHI (JP)
Application Number:
PCT/JP2023/014917
Publication Date:
January 04, 2024
Filing Date:
April 12, 2023
Export Citation:
Assignee:
CANON TOKKI CORP (JP)
International Classes:
H01L21/68; C23C14/56
Foreign References:
| JP2022078570A | 2022-05-25 | |||
| JP2015005663A | 2015-01-08 | |||
| JP2021109984A | 2021-08-02 | |||
| JP2022007540A | 2022-01-13 | |||
| JP2009168860A | 2009-07-30 | |||
| JPH1197512A | 1999-04-09 | |||
| CN103033127A | 2013-04-10 |
Attorney, Agent or Firm:
IP FIRM SHUWA (JP)
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