Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ALLOY FOR PLASMA ETCHING EQUIPMENT, AND FASTENING MECHANISM INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2024/034937
Kind Code:
A1
Abstract:
Provided is an alloy for plasma etching equipment, the alloy comprising: stainless steel; and dysprosium (Dy) added to the stainless steel.

Inventors:
YOON SUK CHEOL (KR)
Application Number:
PCT/KR2023/011003
Publication Date:
February 15, 2024
Filing Date:
July 28, 2023
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ATS CO LTD (KR)
International Classes:
C22C38/44; H01J37/32; H01L21/3065; H01L21/67
Foreign References:
JP3172461U2011-12-22
JPH08225893A1996-09-03
KR20200080790A2020-07-07
JP2007009988A2007-01-18
KR20150055073A2015-05-20
KR102556317B12023-07-18
Attorney, Agent or Firm:
DAHAI INTERNATIONAL PATENT & LAW FIRM (KR)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: ELECTRONIC DEVICE COMPRISING WATERPROOF STRUCTURE

Next Patent: POUCH-TYPE BATTERY CASE AND FORMING DEVICE THEREFOR