Title:
ALUMINUM ALLOY TARGET, ALUMINUM ALLOY WIRING FILM, AND METHOD FOR PRODUCING ALUMINUM ALLOY WIRING FILM
Document Type and Number:
WIPO Patent Application WO/2021/117302
Kind Code:
A1
Abstract:
[Problem] To provide: an aluminum alloy target having low resistance and excellent heat resistance and flexibility; an aluminum alloy wiring film; and a method for producing an aluminum alloy wiring film. [Solution] In order to achieve the above-mentioned purpose, an aluminum alloy target according to one embodiment comprises a main ingredient which comprises aluminum and an element group which is added to the main ingredient and comprises 0.005 at% to 0.88% inclusive of iron and 0.01 at% to 0.05 at% inclusive of vanadium. By using the aluminum alloy target, an aluminum alloy wiring film having low resistance and excellent heat resistance and flexibility can be formed.
Inventors:
WAKAI MASAFUMI (JP)
HANNA TAKU (JP)
NAKADAI YASUO (JP)
NAKAMURA RYOUTA (JP)
HANNA TAKU (JP)
NAKADAI YASUO (JP)
NAKAMURA RYOUTA (JP)
Application Number:
PCT/JP2020/033412
Publication Date:
June 17, 2021
Filing Date:
September 03, 2020
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C14/34; C22C21/00; C23C14/14; H01L21/336; H01L29/786
Domestic Patent References:
| WO2005059198A1 | 2005-06-30 |
Foreign References:
| JP2009035823A | 2009-02-19 | |||
| JP2012224942A | 2012-11-15 | |||
| JP2012162768A | 2012-08-30 | |||
| JP2001011609A | 2001-01-16 | |||
| JP2012180540A | 2012-09-20 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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