AMORPHOUS HYDROGENATED CARBON FILM - FUNDACAO DE AMPARO A PESQUISA

Title:

AMORPHOUS HYDROGENATED CARBON FILM

Document Type and Number:

WIPO Patent Application WO2003027350

Kind Code:

A9

Abstract:

The present invention concerns an improved process for the deposition of amorphous hydrogenated carbon film, more specifically an improved low temperature, low power and low vacuum cathodic sputtering process. The invention also concerns the film produced by said process and articles containing an amorphous hydrogenated carbon film coating.

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Inventors:

GONCALVES NETO LUIZ (BR)
MANSANO RONALDO D (BR)
CIRINO GIUSEPPE A (BR)
ZAMBOM LUIZ S (BR)
VERDONCK PATRICK B (BR)

Application Number:

PCT/BR2002/000067

Publication Date:

October 16, 2003

Filing Date:

May 08, 2002

Export Citation:

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Assignee:

FUNDACAO DE AMPARO A PESQUISA (BR)
GONCALVES NETO LUIZ (BR)
MANSANO RONALDO D (BR)
CIRINO GIUSEPPE A (BR)
ZAMBOM LUIZ S (BR)
VERDONCK PATRICK B (BR)

International Classes:

C23C14/06; C23C14/34; C23C16/26; D06M10/02; D06M11/74; (IPC1-7): C23C14/34; C23C16/26

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