ANALYSIS DEVICE, PROGRAM FOR ANALYSIS DEVICE, AND ANALYSIS METHOD

Title:

ANALYSIS DEVICE, PROGRAM FOR ANALYSIS DEVICE, AND ANALYSIS METHOD

Document Type and Number:

WIPO Patent Application WO/2023/095864

Kind Code:

A1

Abstract:

The present invention is for precisely measuring the concentration of a component to be measured in a processed gas. According to the present invention, the concentration of carbon dioxide is calculated on the basis of absorption at 4.23-4.24 μm or 4.34-4.35 μm by carbon dioxide, the concentration of carbon monoxide is calculated on the basis of absorption at 4.59-4.61 μm by carbon monoxide, the concentration of water is calculated on the basis of absorption at 5.89-6.12 μm by water, the concentration of acetylene is calculated on the basis of absorption at 7.56-7.66 μm or 7.27-7.81 μm by acetylene, the concentration of methane is calculated on the basis of absorption at 7.67-7.80 μm or 8.10-8.14 μm by methane, the concentration of ethylene is calculated on the basis of absorption at 8.46-8.60 μm by ethylene, the concentration of ethane is calculated on the basis of absorption at 6.13-6.14 μm or 6.09-6.45 μm by ethane, the concentration of ammonia is calculated on the basis of absorption at 6.06-6.25 μm or 8.62-9.09 μm by ammonia, and the concentration of methanol is calculated on the basis of absorption at 9.35-9.62 μm by methanol.

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Inventors:

SHIBUYA KYOJI (JP)
HAMAUCHI SHOTA (JP)
TSUKATANI KOSUKE (JP)
NIINA KODAI (JP)
IDO TAKUYA (JP)

Application Number:

PCT/JP2022/043508

Publication Date:

June 01, 2023

Filing Date:

November 25, 2022

Export Citation:

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Assignee:

HORIBA LTD (JP)

International Classes:

G01N21/3504

Domestic Patent References:

WO1995026497A1	1995-10-05
WO2006085646A1	2006-08-17

Foreign References:

JP2002507739A	2002-03-12
JP2006052955A	2006-02-23

Attorney, Agent or Firm:

NISHIMURA, Ryuhei et al. (JP)

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