Title:
ANALYSIS OF MULTI-RUN CYCLIC PROCESSING PROCEDURES
Document Type and Number:
WIPO Patent Application WO/2023/220931
Kind Code:
A1
Abstract:
A method includes receiving time trace sensor data associated with a substrate processing procedure. The substrate processing procedure includes two or more sets of processing conditions. At least a first set of processing conditions and a second set of processing conditions each include one or more operations performed repeatedly. The method further includes separating a first and second portion of the time trace sensor data corresponding to the first and second sets of processing conditions into a first and second plurality of cycle data. The method further includes processing the first plurality of cycle data and the second plurality of cycle data to generate summary data. The method further includes providing an alert to s user. The alert is based on the summary data.
Inventors:
CHAI QINGLIN (SG)
MA YUE (CN)
ZHANG LIMING (US)
HAN XINHAI (US)
WANG CHUAN YING (US)
MA YUE (CN)
ZHANG LIMING (US)
HAN XINHAI (US)
WANG CHUAN YING (US)
Application Number:
PCT/CN2022/093379
Publication Date:
November 23, 2023
Filing Date:
May 17, 2022
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
MA YUE (CN)
MA YUE (CN)
International Classes:
G06F17/16; G05B19/418
Domestic Patent References:
| WO2002019044A2 | 2002-03-07 |
Foreign References:
| CN113671917A | 2021-11-19 | |||
| CN109725120A | 2019-05-07 | |||
| CN113341888A | 2021-09-03 | |||
| CN108705442A | 2018-10-26 | |||
| CN112529528A | 2021-03-19 |
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD. (CN)
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