ANGULAR VELOCITY SENSOR AND METHOD OF ADJUSTING CHARACTERISTICS OF THE SENSOR

Title:

ANGULAR VELOCITY SENSOR AND METHOD OF ADJUSTING CHARACTERISTICS OF THE SENSOR

Document Type and Number:

WIPO Patent Application WO/2002/066930

Kind Code:

A1

Abstract:

An angular velocity sensor, comprising two vibrators, wherein a grinding part of 2$g(m)m or less in surface roughness is formed on at least one ridge line of the two vibrators, whereby the weight balance of the two vibrators can be kept strictly to increase output characteristics.

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Inventors:

OMAWARI TOMOMASA (JP)
TSUBONOUCHI HIROYUKI (JP)

Application Number:

PCT/JP2002/001377

Publication Date:

August 29, 2002

Filing Date:

February 18, 2002

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
OMAWARI TOMOMASA (JP)
TSUBONOUCHI HIROYUKI (JP)

International Classes:

G01C19/56; G01C19/5607; G01C19/5628; G01P21/02; H01L41/08; (IPC1-7): G01C19/56; G01P9/04; H01L29/84

Foreign References:

JPH11351874A	1999-12-24
JPH09201758A	1997-08-05
JPH10197254A	1998-07-31
JPH08201065A	1996-08-09
JPS5471488A	1979-06-08

Other References:

None
See also references of EP 1296114A4

Attorney, Agent or Firm:

Iwahashi, Fumio c/o Matsushita Electric Industrial Co. (Ltd. 1006 Oaza Kadoma Kadoma-shi, Osaka, JP)

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