ANGULAR VELOCITY SENSOR - HITACHI AUTOMOTIVE SYSTEMS LTD

Title:

ANGULAR VELOCITY SENSOR

Document Type and Number:

WIPO Patent Application WO/2010/050393

Kind Code:

A1

Abstract:

Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of: a vibrator which is elastically and displaceably supported on a substrate; a driving means which vibrates the vibrator in the drive axis direction horizontal to the substrate surface; a means for detecting displacement in the detection axis direction, which detects displacement of the vibrator in the detection axis direction which is horizontal to the substrate surface and perpendicular to the drive axis direction; an angular velocity detecting means which detects angular velocity based on the displacement of the vibrator in the detection axis direction; a self-vibration detecting means that detects self-vibration of the vibrator, which is generated due to the fact that the vibration of the vibrator in the drive axis direction leaked in the detection axis direction; a self-vibration feedback circuit which completely cancels self-vibration of the vibrator; and an abnormality determining means which determines abnormality using output from the self-vibration detecting means.

Inventors:

ASANO SATOSHI (JP)
MATSUMOTO MASAHIRO (JP)
OKADA YASUSHI (JP)

Application Number:

PCT/JP2009/068121

Publication Date:

May 06, 2010

Filing Date:

October 21, 2009

Export Citation:

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Assignee:

HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
ASANO SATOSHI (JP)
MATSUMOTO MASAHIRO (JP)
OKADA YASUSHI (JP)

International Classes:

G01C19/56; G01C19/5614; G01C19/5776

Foreign References:

JP2000193460A	2000-07-14
JPH10103960A	1998-04-24
JPH11132770A	1999-05-21
JPH04102013A	1992-04-03
JP2000171257A	2000-06-23

Other References: