Title:
ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/203011
Kind Code:
A1
Abstract:
Provided is an angular velocity sensor that can be made to be more compact and sensitive. An anchor part (7) supports a frame part (6). A first input electrode (81) is positioned outside the frame part (6), is separated from the frame part (6), and is fixed to a substrate (2). A second input electrode (82) is positioned outside the frame part (6), includes an electrode part connected to the frame part (6), opposes the first input electrode (81), and can be displaced in a specified direction. A first reference electrode (91) is positioned inside the frame part (6) and is fixed to the substrate (2). A second reference electrode (92) is positioned inside the frame part (6), includes an electrode part connected to the frame part (6), opposes the first reference electrode (91), and can be displaced in a specified direction. In a structure (3), in a plan view from the thickness direction of the substrate (2), the first input electrode (81) and the electrode part of the second input electrode (82) are positioned between the frame part (6) and a weight part (4) in a specified direction.
Inventors:
TAJI SHOICHI
AIZAWA HIROYUKI
HIRAOKA SOICHIRO
AIZAWA HIROYUKI
HIRAOKA SOICHIRO
Application Number:
PCT/JP2020/009323
Publication Date:
October 08, 2020
Filing Date:
March 05, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01C19/5733
Domestic Patent References:
| WO2018193890A1 | 2018-10-25 |
Foreign References:
| US8322213B2 | 2012-12-04 | |||
| US20150377621A1 | 2015-12-31 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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