Title:
ANISOTROPIC ELECTROCONDUCTIVE SHEET AND METHOD FOR MANUFACTURING ANISOTROPIC ELECTROCONDUCTIVE SHEET
Document Type and Number:
WIPO Patent Application WO/2023/234088
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an anisotropic electroconductive sheet configured to stably withstand repeated inspection without causing peeling of through-electrodes, while preventing force from being exerted on an object for inspection, such as a semiconductor device. An anisotropic electroconductive sheet (1) has a sheet-shaped insulating layer (2) made of a resin material, a plurality of through-holes (2c) penetrating the insulating layer (2) in the thickness direction, and through-electrodes (3) made of a metal thin film formed in the through-holes (2c). The through-electrodes (3) are formed by a plurality of split electrodes (31) (or split electrodes (32)) being arranged in the circumferential direction of the through-holes (2c).
Inventors:
HASE SHINGO (JP)
SATO AKIRA (JP)
SATO AKIRA (JP)
Application Number:
PCT/JP2023/018876
Publication Date:
December 07, 2023
Filing Date:
May 22, 2023
Export Citation:
Assignee:
TOTOKU INC (JP)
TAKANO CO LTD (JP)
TAKANO CO LTD (JP)
International Classes:
H01R11/01; H01R43/00
Foreign References:
| JP2020027859A | 2020-02-20 | |||
| JPS58139517A | 1983-08-18 |
Attorney, Agent or Firm:
WATANUKI PATENT SERVICE BUREAU (JP)
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