Title:
ANTI-FINGERPRINT AND ANTI-REFLECTION COATING METHOD AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/176990
Kind Code:
A1
Abstract:
The present invention relates to an anti-fingerprint and anti-reflection coating method and apparatus. The coating method comprises the steps of: alternately depositing titanium dioxide (TiO2) or niobium pentoxide (Nb2O5), which is a high-refractive material, and silicon dioxide (SiO2), which is a low-refractive material, on a surface of a base material so as to form a multilayer film; and depositing a fluorine compound on the surface of the base material on which the multilayer film is deposited. Either the titanium dioxide (TiO2) or the Niobium pentoxide (Nb2O5) is deposited through a sputtering process, and the silicon dioxide (SiO2) is deposited through a plasma-enhanced chemical vapor deposition (PECVD) process. Further, the fluorine compound is deposited through a thermal evaporation process.
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Inventors:
KIM YOUN TAEG (KR)
Application Number:
PCT/KR2012/003989
Publication Date:
December 27, 2012
Filing Date:
May 21, 2012
Export Citation:
Assignee:
VACOS CO LTD (KR)
KIM YOUN TAEG (KR)
KIM YOUN TAEG (KR)
International Classes:
C23C14/34; C23C14/02; C23C14/24; C23C16/50
Foreign References:
| KR20090069023A | 2009-06-29 | |||
| KR20070018856A | 2007-02-14 | |||
| KR100327835B1 | 2002-03-09 | |||
| KR100932694B1 | 2009-12-21 | |||
| KR20100134918A | 2010-12-24 |
Attorney, Agent or Firm:
YOON & YANG (KR)
특허법인 화우 (KR)
특허법인 화우 (KR)
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Claims: