Title:
ANTI-REFLECTIVE COATING COMPOSITION AND CROSSLINKABLE POLYMER
Document Type and Number:
WIPO Patent Application WO/2023/070957
Kind Code:
A1
Abstract:
The present invention provides an anti-reflective coating composition, comprising an organic polymer. The organic polymer comprises a crosslinkable polymer. The crosslinkable polymer comprises a monomer unit formed by a monomer represented by formula (I), wherein R1 is selected from substituted or unsubstituted C2-C10 alkenyl, and R2 and R3 are each independently selected from H, substituted or unsubstituted C1-C6 alkyl, and substituted or unsubstituted C6-C20 aryl. Compared with the prior art, the crosslinkable polymer provided by the present invention comprises the monomer unit that can be self-crosslinked with functional groups such as hydroxyl, amino, and sulfydryl, such that a crosslinking agent does not need to be added to a coating, the generation of a gas in the baking process of the composition can be effectively solved or avoided, an unnecessary cleaning procedure is reduced, moreover, the risk that a pattern is damaged due to solid falling caused by gas condensation is reduced, the corresponding technological process can be simplified, and the cost is saved.
Inventors:
ZHANG AIQIANG (CN)
CHEN RENZHI (CN)
NEISSER MARK (CN)
JIANG YIMIN (CN)
CHEN YUAN (CN)
CHEN RENZHI (CN)
NEISSER MARK (CN)
JIANG YIMIN (CN)
CHEN YUAN (CN)
Application Number:
PCT/CN2022/072277
Publication Date:
May 04, 2023
Filing Date:
January 17, 2022
Export Citation:
Assignee:
TAN KAH KEE INNOVATION LABORATORY (CN)
International Classes:
C09D133/26; C08F220/56; C08L33/26; G03F7/09; G03F7/11; H01L21/027
Foreign References:
| CN113913075A | 2022-01-11 | |||
| US6242161B1 | 2001-06-05 | |||
| CN101506736A | 2009-08-12 | |||
| JP2009025670A | 2009-02-05 | |||
| US20140106570A1 | 2014-04-17 | |||
| CN106164774A | 2016-11-23 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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