Title:
ANTI-REFLECTIVE COATING MATERIAL, INTEGRATED CIRCUIT AND PREPARATION METHOD THEREFOR, AND ELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/002277
Kind Code:
A1
Abstract:
The embodiments of the present application provide an anti-reflective coating material, an integrated circuit and a preparation method therefor, and an electric device. The anti-reflective coating material comprises: a polyhydroxystyrene derivative. The polyhydroxystyrene derivative at least comprises polyhydroxystyrene and a light-absorbing group, wherein the light-absorbing group is used for light absorption. At least one hydrogen atom on the benzene ring of the polyhydroxystyrene is substituted by the light-absorbing group. Compared with a micromolecular glass system, the polyhydroxystyrene derivative has a relatively high film-forming property and a relatively good etching resistance, such that it can be ensured that the anti-reflective coating material containing the polyhydroxystyrene derivative has a relatively high film-forming property and a relatively good etching resistance. Furthermore, the light absorption performance of the anti-reflective coating material depends on the light-absorbing group in the polyhydroxystyrene derivative, and the n and k values of the anti-reflective coating material can be adjusted by adjusting the introduced light-absorbing group so as to ensure the stability of the anti-reflective coating material from batch to batch.
Inventors:
LI XUEMIAO (CN)
ZHOU HUIHUI (CN)
WANG LIYUAN (CN)
DU ZECHAO (CN)
WANG HAOYANG (CN)
ZHOU HUIHUI (CN)
WANG LIYUAN (CN)
DU ZECHAO (CN)
WANG HAOYANG (CN)
Application Number:
PCT/CN2023/104092
Publication Date:
January 04, 2024
Filing Date:
June 29, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
C09D125/18; G03F7/09
Foreign References:
| CN110590976A | 2019-12-20 | |||
| CN112680052A | 2021-04-20 | |||
| CN102879999A | 2013-01-16 | |||
| CN1253639A | 2000-05-17 | |||
| CN1260355A | 2000-07-19 | |||
| CN1615460A | 2005-05-11 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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