Title:
ANTI-VIBRATION DEVICE FOR PHOTOETCHING MACHINE AND PHOTOETCHING MACHINE
Document Type and Number:
WIPO Patent Application WO/2022/036753
Kind Code:
A1
Abstract:
An anti-vibration device for a photoetching machine and a photoetching machine using the anti-vibration device, specifically relating to the field of part detection. The anti-vibration device comprises a main body base (1), a gas pressure sealer (3) and a magnetic suspension anti-vibration mechanism (2); the magnetic suspension anti-vibration mechanism (2) and the gas pressure sealer (3) are respectively mounted in the main body base (1), the gas pressure sealer (3) releases a gas, such that the magnetic suspension anti-vibration mechanism (2) performs primary suspension under the action of the gas pressure, the magnetic suspension anti-vibration mechanism (2) comprises a magnetic suspension moving plate (21), sealing slide balls (22) and a guide plate (23); the magnetic suspension moving plate (21) is embedded in the guide plate (23), the magnetic suspension moving plate (21) is slidably mounted in the guide plate (23), and the sealing slide balls (22) are movably mounted between the magnetic suspension moving plate (21) and the guide plate (23). The anti-vibration device has a reasonable and simple structure and low manufacturing cost, is easy to mount, has complete functions, can satisfy the rigidity requirement and slight vibration prevention requirement of a photoetching machine for a base, and can reduce vibration, thereby further improving the machining precision.
Inventors:
GE JUNHAI (CN)
HUANG LIHUI (CN)
DAI CHENGJIE (CN)
ZHAO YONGJIE (CN)
HUANG LIHUI (CN)
DAI CHENGJIE (CN)
ZHAO YONGJIE (CN)
Application Number:
PCT/CN2020/112423
Publication Date:
February 24, 2022
Filing Date:
August 31, 2020
Export Citation:
Assignee:
KUWAVE NANJING SOFTWARE TECH CO LTD (CN)
International Classes:
G03F7/20; F16F15/02; F16F15/023
Foreign References:
| CN205085675U | 2016-03-16 | |||
| CN208334911U | 2019-01-04 | |||
| CN111365400A | 2020-07-03 | |||
| TW201416559A | 2014-05-01 | |||
| JP2000145885A | 2000-05-26 | |||
| JP2016090034A | 2016-05-23 |
Attorney, Agent or Firm:
BEIJING LAWSING IP FIRM (CN)
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