Title:
ANTIREFLECTION STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/125207
Kind Code:
A1
Abstract:
Provided is an antireflection structure wherein, in a transparent base material (B) in which a plurality of holes (Hn) each having a cross-sectional U or V shape in a direction perpendicular to a flat surface are formed, regarding the shape of each of the holes (Hn), the average diameter (m) of an opening being 50-300 nm, the average interval (k) between the respective center points of the adjacent openings being100-400 nm, and the depth (dn) of each hole (Hn) based on a surface part (S) being 80-250 nm, a metal oxide film is disposed on the surface part (S) and in a space part (Cn) in an upper direction from the bottom of each hole (Hn). The thickness (tn) of the metal oxide film disposed in each space part (Cn) increases with increase in the depth (dn) of each hole (Hn), and thereby the difference in the depth (fn) from an uppermost surface part (Sm) of the metal oxide film disposed on the surface part (S) to a surface part of the metal oxide film disposed in each space part (Cn) between the respective holes (Hn) decreases.
Inventors:
KURIHARA KAZUMA (JP)
HOKARI RYOHEI (JP)
FUKUI HIROAKI (JP)
HOKARI RYOHEI (JP)
FUKUI HIROAKI (JP)
Application Number:
PCT/JP2020/046890
Publication Date:
June 24, 2021
Filing Date:
December 16, 2020
Export Citation:
Assignee:
AIST (JP)
TOA ELECTRIC IND CO LTD (JP)
TOA ELECTRIC IND CO LTD (JP)
International Classes:
G02B1/118; B32B3/30; B32B7/023; B32B9/00; C03C17/245; C23C14/08; C23C14/10; C23C14/34
Domestic Patent References:
| WO2008071906A1 | 2008-06-19 |
Foreign References:
| JP2007322763A | 2007-12-13 | |||
| JP2015001578A | 2015-01-05 | |||
| JPS6273203A | 1987-04-03 | |||
| JP2014170071A | 2014-09-18 | |||
| JP2016139138A | 2016-08-04 | |||
| JP2019227726A | 2019-12-17 | |||
| JP2001272505A | 2001-10-05 | |||
| JP2006243633A | 2006-09-14 | |||
| JPH08281692A | 1996-10-29 | |||
| JPH11314256A | 1999-11-16 |
Other References:
J. A. THORNTON, J VAC. SCI. TECHNOL., vol. 11, 1974, pages 666
See also references of EP 4080253A4
See also references of EP 4080253A4
Attorney, Agent or Firm:
HIROSAWA Kuninori et al. (JP)
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