Title:
ANTISTATIC SHEET
Document Type and Number:
WIPO Patent Application WO/2014/156943
Kind Code:
A1
Abstract:
Provided is an antistatic sheet having high work efficiency, which is designed for the purpose of developing, improving and stabilizing antistatic properties during a semiconductor production process and the like. An antistatic sheet which is a laminate obtained by laminating a polymer gel on an antistatically treated base sheet. The polymer gel is a gel wherein at least water in which a polyvinyl alcohol polymer is dissolved and a polyhydric alcohol other than the polyvinyl alcohol polymer are held in a polymer matrix that is obtained by copolymerization crosslinking a polymerizable monomer that has one polymerizable carbon-carbon double bond in each molecule and a crosslinkable monomer that has two or more polymerizable carbon-carbon double bonds in each molecule. This antistatic sheet has a ground resistance of from 1.0 × 105 Ω to 1.0 × 1012 Ω (inclusive), and the surface resistivity of the front surface of the base sheet is from 1.0 × 104 Ω/□ to 1.0 × 1012 Ω/□ (inclusive).
Inventors:
KATO KAZUKI (JP)
FUJIWARA YASUHIRO (JP)
FUJIWARA YASUHIRO (JP)
Application Number:
PCT/JP2014/057734
Publication Date:
October 02, 2014
Filing Date:
March 20, 2014
Export Citation:
Assignee:
SEKISUI PLASTICS (JP)
International Classes:
H05F1/00; C08K5/053; C08L29/04; C08L33/26; C09J7/02; C09J157/00
Foreign References:
| JP2010275504A | 2010-12-09 | |||
| JP2004218219A | 2004-08-05 |
Attorney, Agent or Firm:
OHTAKE, Seigo et al. (JP)
Shogo Otake (JP)
Shogo Otake (JP)
Download PDF:
Previous Patent: PROCESS FOR MANUFACTURING MARAGING STEEL AND METHOD FOR REFINING INCLUSIONS
Next Patent: HYDRAULIC CONTROL DEVICE
Next Patent: HYDRAULIC CONTROL DEVICE