Title:
APPARATUS FOR APPLYING LIQUID, METHOD FOR APPLYING LIQUID, AND NANO-IMPRINT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/002301
Kind Code:
A1
Abstract:
Disclosed is an apparatus for applying a liquid, which is provided with: a liquid jetting head, which is provided with a plurality of nozzles (120A-120C) that drop the functional liquid on a substrate, and liquid chambers (122A-122C) that are partitioned by means of a side wall (121) having at least a part thereof configured of piezoelectric elements (123-1 to 123-4), said liquid chambers communicating with the nozzles, respectively, and which drops droplets by shear-deforming the piezoelectric elements; and a transfer section, which relatively moves the substrate and the liquid jetting head. The nozzles provided in the liquid jetting head are grouped into three or more groups (a group of nozzles (120A), a group of nozzles (120B), and a group of nozzles (120C)) such that the adjacent nozzles on both the sides belong to different groups, the liquid is dropped in the same dropping timing only from the nozzles that belong to the same group, and motion of the piezoelectric elements is controlled such that the liquid is discretely landed on the substrate.
Inventors:
KODAMA KENICHI (JP)
OMATSU TADASHI (JP)
WAKAMATSU SATOSHI (JP)
KODAMA KUNIHIKO (JP)
OMATSU TADASHI (JP)
WAKAMATSU SATOSHI (JP)
KODAMA KUNIHIKO (JP)
Application Number:
PCT/JP2011/064626
Publication Date:
January 05, 2012
Filing Date:
June 27, 2011
Export Citation:
Assignee:
FUJIFILM CORP (JP)
KODAMA KENICHI (JP)
OMATSU TADASHI (JP)
WAKAMATSU SATOSHI (JP)
KODAMA KUNIHIKO (JP)
KODAMA KENICHI (JP)
OMATSU TADASHI (JP)
WAKAMATSU SATOSHI (JP)
KODAMA KUNIHIKO (JP)
International Classes:
H01L21/027; B05C5/00; B05C11/10; B05D1/26; B05D5/06; B05D7/00; B29C59/02
Domestic Patent References:
| WO2005120834A2 | 2005-12-22 |
Foreign References:
| JP2009190306A | 2009-08-27 | |||
| JP2009103823A | 2009-05-14 | |||
| JP2007125748A | 2007-05-24 | |||
| JP2009202044A | 2009-09-10 | |||
| JP2009090208A | 2009-04-30 | |||
| JPH06218951A | 1994-08-09 | |||
| JP2006047235A | 2006-02-16 | |||
| JP2007117833A | 2007-05-17 | |||
| JP2008209701A | 2008-09-11 | |||
| JP2008213421A | 2008-09-18 | |||
| JP2010005502A | 2010-01-14 | |||
| JP2009088376A | 2009-04-23 | |||
| JP2010101933A | 2010-05-06 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
Kenzo Matsuura (JP)
Kenzo Matsuura (JP)
Download PDF:
Claims: