Title:
APPARATUS FOR FORMING ORGANIC POLYMER THIN FILM UTILIZING PLASMA
Document Type and Number:
WIPO Patent Application WO/1980/000346
Kind Code:
A1
Abstract:
An apparatus for forming an organic polymer thin film not to be decomposed or deteriorated, by effectively polymerizing a polymerizable organic compound monomer onto a base plate under the use of plasma. This apparatus comprises a reactor (10) retaining a base plate (12), a microwave discharge tube (20) for feeding into the reactor (10) a carrier gas activated by microwave discharge, activating microwave-generating means (30) equipped with cavity resonator (31) for microwave discharge, means for feeding said carrier gas into microwave discharge tube (20), and means for feeding said polymerizable organic compound monomer into reactor (10). A plasma-forming zone (24) does not reach and is completely separated from reactor (10). The base plate having formed thereon the organic polymer thin film obtained by means of this apparatus is utilized as photo sensors, temperature sensors, optical filters, etc.
Inventors:
AKAI Y (JP)
HIROSE M (JP)
HIROSE M (JP)
Application Number:
PCT/JP1979/000193
Publication Date:
March 06, 1980
Filing Date:
July 25, 1979
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO (JP)
AKAI Y (JP)
HIROSE M (JP)
AKAI Y (JP)
HIROSE M (JP)
International Classes:
B01J19/12; C08F2/46; C08F2/52; C08F2/00; C08F2/54; C08J7/00; (IPC1-7): C08F2/52; C08F2/46
Foreign References:
| JPS4217486B1 | ||||
| JPS4538542B1 | ||||
| JPS4635242Y2 | ||||
| JPS4988982A | 1974-08-26 |
Other References:
Kobunshi, Vol. 25, No. 12, P834-837, 1976
Macromolecules 7(3), P277-83, 1974
Macromolecules 7(3), P277-83, 1974
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