Title:
APPARATUS FOR MANUFACTURING FILM AND METHOD FOR MANUFACTURING FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2016/047972
Kind Code:
A3
Abstract:
Provided is an apparatus for manufacturing a film. The apparatus for manufacturing a film comprises: a container which is disposed within a reactor and in which a first source is accommodated; a first source supply unit for supplying the first source into the container; and a second source supply unit for supplying, into the container, a second source which reacts with the first source, wherein the container may comprise: a bottom surface; a side surface extending upwardly from the bottom surface; and a plurality of openings provided at the side surface.
Inventors:
LEE SEONGKUK (KR)
SHIM KWANGBO (KR)
SHIM KWANGBO (KR)
Application Number:
PCT/KR2015/009824
Publication Date:
May 18, 2017
Filing Date:
September 18, 2015
Export Citation:
Assignee:
IUCF-HYU(INDUSTRY-UNIVERSITY COOP FOUND HANYANG UNIVERSITY) (KR)
International Classes:
H01L21/02; H01L21/20
Foreign References:
| KR20110097502A | 2011-08-31 | |||
| KR20100048480A | 2010-05-11 | |||
| KR20090093064A | 2009-09-02 | |||
| JP2002173393A | 2002-06-21 | |||
| KR20090027891A | 2009-03-18 |
Attorney, Agent or Firm:
PARK, Sangyoul (KR)
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